Product Center, Comprehensive Quantum Computing Product Support
Product Center
Comprehensive Quantum Computing Product Support
Origin Quantum develops quantum-computing technologies and products across hardware, software, cloud services, security and education. Explore product capabilities and use cases by category, or contact us for product information and consultation.
Nondestructive Probe Station
The nondestructive probe station is a semi-automatic device for the precise measurement of electrical parameters of superconducting quantum chips at normal temperature, with the minimum measuring range to micron level. The most important feature is that it can measure the electrical parameters of qubits at room temperature without affecting their performance. The device is also suitable for wafer precision electrical parameter testing in semiconductor industry.
Features
High stability, high motion precision, multi-degree-of-freedom controllable chip adsorption platform.
The micromirrope magnification is variable, and the minimum test area is up to micron level.
The film wound caused by the probe directly pierces through, with a diameter within 2-3μm
Semi-automatic control, convenient man-machine interaction.
Specifications
| Perfomance | |
| Type | NDPT-100 |
Z-direction repeated posting accuracy | 1μm |
| Sample size | ≤4-inch |
| Z-direction resolution | FULL/HALF STEP 0.5μm/0.25μm |
| Sample fixation method | Vacuum absorption |
| Optical magnification | 1.25X-15X |
| XY-direction motion postioning accuracy | 1μm |
Resolution of microscope | 11.18-1.68μm |
| Repeat position accuracy in XY direction | 3μm |
| Other | |
| Power source | 208-230V, 50/60Hz 3kW |
| Boundary dimension | 1400mm*800mm*1800mm(length, width and height) |
| Nondestructive Probe Arm (Optional) | |
 | Positional accuracy:1μm Acupuncture force sensitivity:20μN |
